| abstract |
Monomers having electron-withdrawing groups, as represented by the general formula (a), (b) or (c), wherein A?1, A2, and A3¿ are each a ring; R?a, Rb, Rc, and Ru¿ are each independently hydrogen or an organic group; at least one of R?s, Rw, and Rv¿, at least one of R?t and Rw1¿, and at least one of the two Rw2s are each an electron-withdrawing group, and the others are each hydrogen or an organic group; W1 is a single bond or a connecting group; and n is an integer of 2 to 25, with the proviso that two or more of R?a, Rb, Rc, Rs, Rt, Ru, Rv, Rw, Rw1, Rw2, W1¿, and the constituent carbon atoms of A?1, A2, and A3¿ may be united to form a ring. The electron-withdrawing group defined for R?s, Rt, Rv, Rw, Rw1, and Rw2¿ is a fluorine-containing group or the like. The monomers are useful as raw material in producing polymers for photoresists. |