| abstract |
Apparatus and methods are provided for microfabricated sensors for use as resonant sensors. In one embodiment, an array of sensors is formed by having an electrically common membrane, an insulative spacer and a base including a driving element. Optionally, electrostatic drive forces cause the membrane to resonate, and a binding event is detected. Detection may be capacitive, piezoelectrical, piezoresistive or optical. Optional vents permit equilibration to atmosphere. Detection circuitry including phase lock loop circuitry or tunable oscillator circuitry may be utilized. High throughput screening, such as for drug discovery can be achieved. |