| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcee113b30bb2654b8fe8ba9b66ab09c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
2002-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30d87373d27de549c658286d1bb71a7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de24e9d1dabcbafab65585db0f8c75b6 |
| publicationDate |
2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1320123-A1 |
| titleOfInvention |
Manufacturing process of an electronic device comprising an inductive micro component |
| abstract |
The invention relates to a method for manufacturing electronic components incorporating an inductive micro-component, disposed above a substrate. Such a component comprises: at least one superposition of a layer (10, 10a) of material with low relative permittivity and of a layer of hard mask, the first layer (10) of material with low relative permittivity resting on the upper face substrate (1); a set of metal turns (39) defined above the superposition of layers (10, 10a) of material with low relative permittivity; a layer (35) barrier to the diffusion of copper, present on the lower and lateral faces of metal turns (39). <IMAGE> |
| priorityDate |
2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |