| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_adb146d87870d37d5373cddc4d284a04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12603c7b4cb6dffde927dd0d073149ac |
| publicationDate |
2017-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1314188-B1 |
| titleOfInvention |
Process for cleaning semiconductor processing components |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109107974-A |
| priorityDate |
2000-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |