Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22 |
filingDate |
2002-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2012-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6d0f373c2be10f166d26335c12da74b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38308549fdbb9c65c976b673ffc9cc30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11d08fb1bdc2dabc32da488e630b19c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c5bd0a1d03685933a67bd0666edf50d |
publicationDate |
2012-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1308782-B1 |
titleOfInvention |
Chemically amplified positive resist composition and patterning process |
priorityDate |
2001-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |