http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1295176-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-30 |
| filingDate | 2001-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6609cabb439f85d94359f965186cdb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_623ba4520752fbc2d54919d6cb72301c |
| publicationDate | 2003-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1295176-A2 |
| titleOfInvention | Transmission and phase balance for phase-shifting mask |
| abstract | The present invention comprises a phase-shifting mask and a process for fabricating such a phase-shifting mask. The phase-shifting mask has trenches with vertical sidewall profiles which are retrogade. The retrogade profiles balance the transmission and phase of the light transmitted through the phase-shifted openings relative to the non-phase-shifted openings. The retrograde profile may be formed from an isotropic plasma etch. |
| priorityDate | 2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.