| abstract |
The present invention provides an electrolytic cell, which can efficiently produce, charged water having an excellent performance of improving surface cleaning or treatment of an object, e.g., semiconductor, glass, or resin and of cleaning and sterilizing medical device. <??>The electrolytic cell of the present invention is for producing charged anode water suitable for surface cleaning or treatment, including the cathode chamber 41 and anode chamber 50, fluorinated cation-exchange membrane 46 provided to separated these chambers from each other, cathode 44 closely attaché to the cation-exchange membrane 45 on the side facing the cathode chamber 41, and middle chamber 48 filled with the cation-exchange resin 46, provided on the other side of The cation-exchange membrane 46, the cation-exchange resin 46 being arranged in such a way to come into contact with the fluorinated cation-exchange membrane 45, wherein the feed water is passed into the middle chamber 48 and passed thorough The anode chamber 50 to be recovered as the charged anode water. <IMAGE> |