| abstract |
A manifold for transfer of chemical, comprising; a heated first conduit (26) fornconnecting a vessel for containing the chemical to a another vessel, a source ofnpressurized gas and a source of vacuum; a heated first block valve assembly (14) having firstnand second diaphragm valves (75,77), each valve having a diaphragm (74,74a) and a valve seat side (78,78a) andna diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valvenseat side of the other valve, and each valve seat side of each valve communicating withnthe first conduit (16); a first connector in the first conduit for detaching the conduit from thenvessel; a second conduit (12), for delivering chemical to the vessel, the second conduitnconnected to the diaphragm side of the first valve (75); and a third conduit (18), for communicatingnpressurized gas and vacuum to the first conduit, connected to the diaphragm side of thensecond valve (77). |