| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f7156a7fd1a34fcd59fc2d6606f310e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3387 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36 |
| filingDate |
2001-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6e28085d23cd144768c093c743029cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb4c6286e301b57a93e1c19c83afe945
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6cef743a5a011dd219d0d01598ae5bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_126279494516bcbff664278da4afe96d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d068d90ea93d9766ab7d04bde9d291f4 |
| publicationDate |
2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1288329-A1 |
| titleOfInvention |
Process for fabricating of thin nitride- or oxide layers |
| abstract |
In order to convert only the substrate material into the corresponding oxide or nitride in the production of thin oxide or nitride layers by means of a plasma jet from a high-frequency plasma jet source, without attacking the underlying ferromagnetic layer, the ion energy and ion beam density of a dense, highly ionized, quasi-neutral plasma jet become high Proportion of oxygen or nitrogen species controlled independently. The reaction rate can thus be set independently of the penetration depth and high-quality oxide or nitride layers are obtained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005085491-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2005219596-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2876391-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2879625-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005085491-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2896515-A1 |
| priorityDate |
2001-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |