| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24818 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2001-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce4a2a17c61e9b4f64ba1b0f1182d21a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4f72e78bd50c2374c2718c5c2dab71b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7413380411c2530b1cb629a0aa70870
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67931101c7b61440a4fbf9418a007d90 |
| publicationDate |
2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1286792-A1 |
| titleOfInvention |
Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them |
| abstract |
A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1577757-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7615288-B2 |
| priorityDate |
2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |