| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa880489649496bf1e47643fc0625fd3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2203-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2230-01 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_552307bbb39450a901b447cf37e01757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a2302e1d7b246decd425d3e43c75730
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c78a6f609d075992e11b8eefc5563b8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8de483797b8c5408156b1fe7ecd0fec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124568f10567be9b50c592d646cecd92 |
| publicationDate |
2003-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1272288-A1 |
| titleOfInvention |
Processes and apparatus for treating electronic components |
| abstract |
A process for treating an electronic component (11) wherein the electronic component (11) is exposed to a heated solvent (15) and subsequently to an ozonated process fluid. The electronic component (11) is optionally exposed to the heated solvent (15) by exposing the electronic component (11) to a passing layer of heated solvent. An apparatus for treating electronic component (11) with a heated solvent (15) and ozonated fluid is also provided. |
| priorityDate |
2000-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |