http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1253172-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2003-2227 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-22 |
| filingDate | 2000-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e6266ae028b7cd6850372f6996d4cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3b08b326df0fb8dedc7e284db05c11f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a33a76e9a05a7a3c0063a06e2afe4f58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6977f1f87ab299270206fbe89060abe |
| publicationDate | 2002-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1253172-A1 |
| titleOfInvention | Molded elastomer for semiconductor production apparatus and crosslinkable fluoroelastomer composition |
| abstract | Elastomer molded article for semiconductor productionnapparatuses which is obtained by crosslinking and molding ancrosslinkable fluorine-containing elastomer composition comprising ancrosslinkable fluorine-containing elastomer component and finenparticles of aluminum oxide having an average particle size of not morenthan 0.5 µm. The elastomer molded article is excellent in plasmanresistance and an amount of micro particles generated after irradiationnof plasma is very small and therefore a very clean molded article fornsemiconductor production apparatuses, particularly a sealing materialnto be used in an environment of plasma irradiation is provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108610796-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108610796-A |
| priorityDate | 1999-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 169.