| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-869 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G12B21-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 |
| filingDate |
2001-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dec7cba0888af82250b956e44c428540 |
| publicationDate |
2004-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1179748-B1 |
| titleOfInvention |
Combination of imaging and scanning methods for checking reticles |
| priorityDate |
2000-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |