Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e70c0aeade92d7571d955d3b90ea06e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D301-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D303-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D303-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F16-26 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D303-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D303-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D301-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-22 |
filingDate |
2000-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f207894b60ac0917a781615154e04ae4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_682dddf6ded30ac5da6d3fa2f8820153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f405d1896ca588952af538617fa58e67 |
publicationDate |
2002-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1177184-A2 |
titleOfInvention |
Polyfluorinated epoxides and associated polymers and processes |
abstract |
A method for producing partially fluorinated epoxides and corresponding polyether homopolymers of these polyfluorinated epoxides is described. Also described is a method for incorporating a fluoroalcohol functional group into a polymer as a pendant group. Certain perfluorinated olefins are also described. These polyfluorinated epoxides and the associated polymers and methods relating to them are useful components in photoresists, particularly in lithographic photoresists for use at low ultraviolet wavelengths (e.g., 157 nm). |
priorityDate |
1999-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |