| abstract |
An article with a predetermined surface pattern thatnis coated with a film which makes possible the completentransfer of the pattern of a patterning die and thick-filmnpatterning having a depth to the order of several tens ofnmicrometers, prevents the occurrence of cracks, has high filmnhardness, and has a surface pattern which is the inverse ofnthe surface pattern of the patterning die. This article isnproduced by joining a patterning die closely to a substratenwith a sol-gel material containing the silane compoundnrepresented by the formula: R 1 SiX 3 (wherein R 1 is an alkylngroup or hydrogen and X is an alkoxyl group or a halogen atom)nand the silane compound represented by the formula: R 2 SiY 3 n(wherein R 2 is an aryl group or a substituted aryl group andnY is an alkoxyl group or a halogen atom) disposed therebetweennin the form of a film and heating them to coat the surfacenof the substrate with a gel film having a surface patternnwhich is the inverse of the surface pattern of the patterningndie. |