http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1167955-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d840cb02263c577340ffa36838559378 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2027-222 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-226 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
| filingDate | 2001-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e5028d593190fd0f6388a707e72dd9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa38a9683346d1a7287009b85ad2f443 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1c54718c4097d054c903ce6d8dcea7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7433ed09ec8726ee40513df1f30710a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d15d46dabc85c60af89dd33690774e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48b2325104e8afc1fd140a621f829b6c |
| publicationDate | 2002-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1167955-A2 |
| titleOfInvention | High temperature matter sensor |
| abstract | ein Substrat (4), eine Anordnung (6), um den Sensor auf Temperatur zu bringen und zu halten,nund eine schichtartige Kondensatorstruktur (38) mit Strukturgrößen kleiner alsn50µm, auf die eine Funktionsschicht (18) aufgebracht ist. The invention relates to a high-temperature substance sensor, comprising a substrate (4), an arrangement (6) for bringing the sensor to temperature and maintaining it, and a layer-like capacitor structure (38) with structure sizes smaller than 50 μm, to which a functional layer (18) is applied. n n n Aufbringen einer geschlossenen oder bereits vorstrukturierten elektrisch leitfähigennSchicht als Vorläufer der Kondensatorstruktur (38) mittels Dickschichttechnik, Strukturierung der elektrisch leitfähigen Schicht mittels photolithographischemnVerfahren. n According to the invention, the layered capacitor structure (38) was produced as follows: Applying a closed or already pre-structured electrically conductive layer as a precursor of the capacitor structure (38) using thick-film technology, Structuring of the electrically conductive layer using a photolithographic process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010130370-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009021734-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9068913-B2 |
| priorityDate | 2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.