| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4557 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f3f3db78fb7bcbd50cd1c94df79cf04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_336eead9b1ab5e068b044c0726bd03ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f7526ff0010d52496da9c3fa5210547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13c65a2169c9b573437db92abe396f49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c38acccd0155067fe800ff598e147e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_416dabe726f3050edd7ed74b483a37d2 |
| publicationDate |
2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1167568-B1 |
| titleOfInvention |
Heat treatment apparatus and cleaning method of the same |
| priorityDate |
2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |