Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate |
2001-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a880c57d18211d7efe8c42561c620edb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a914624107e922abe02385d920b1a384 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93bf713b52478844876c59f4f0f15cd2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a459d660445e3487faa3b393d7b90c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9daa919a243dad79cfa36f2d097bd83d |
publicationDate |
2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1167482-B1 |
titleOfInvention |
Aqueous dispersion for chemical mechanical polishing used for polishing of copper |
priorityDate |
2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |