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filingDate 2000-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0642b989d0a7269bca8087ad67534070
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publicationDate 2001-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1163550-A1
titleOfInvention Hydroxy-amino thermally cured undercoat for 193 nm lithography
abstract A photolithographic sensitive coated substrate comprising a thermally cured undercoat on the substrate, and a radiation-sensitive resist topcoat on the thermally cured undercoat.
priorityDate 1999-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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