Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcd1a217ba95dc487e1e6ee172da349 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D13-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D13-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00 |
filingDate |
2000-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cde96b0d869f01da376146fca4b403a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1000d88b99d381964f3dde891ac5ff1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_320362a30e7091b49f99ffc3ba5ad4f0 |
publicationDate |
2001-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1161322-A1 |
titleOfInvention |
Improved polishing pads and methods relating thereto |
abstract |
This invention describes improved polishing pads useful in the manufacture of semiconductor devices or the like. The pads of the present invention have an advantageous hydrophilic polishing material and are sufficiently thin to generally improve predictability and polishing performance. |
priorityDate |
1999-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |