| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_260220c525b214105ee48ee2d77a5bf4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2000-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_028bedd44c9599b6f8624604f81da013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18eeed921f7376aeea0c2157ea76c272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab85d4258a70c6c32f5fb179188e2293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8981a3844fc7ec402337bc22cfebbb90 |
| publicationDate |
2007-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1149412-B1 |
| titleOfInvention |
Dielectric films from organohydridosiloxane resins |
| abstract |
A method of making a dielectric film on a substrate from a composition containing an organohydridosiloxane resin is presented. The organohydridosiloxane resins have a cage conformation. The process of making a dielectric film includes forming a solution of a solvent and the organohydridosiloxane resin, dispensing the solution on a substrate, spinning the substrate, baking the substrate to remove the solvent, and curing the substrate to form the dielectric film. Dielectric films of the present invention exhibit dielectric constants of approximately 3.0 or lower. |
| priorityDate |
1999-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |