http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1143298-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
| filingDate | 2000-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29271fd84b44087736fc74a1d4c36a91 |
| publicationDate | 2001-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1143298-A1 |
| titleOfInvention | Photosensitive composition |
| abstract | A radiation sensitive composition useful as a photoresistncontaining a resin composition and a radiation sensitivenmaterial, wherein the resin composition comprises a mixture ofntwo or more resins different from each other by at least 0.03nin refractive index or comprises a resin component of annalkali-soluble resin and a resin additive of a resin workingnas a dissolution inhibitor for the radiation sensitivencomposition, such as an acrylic polymer, a methacrylic polymernor a styrenic polymer. A dissolution rate in a 2.38 weight-%naqueous tetramethylammonium hydroxide solution of thenradiation sensitive composition is preferably 5000 Å/min ornless. Use of these resin compositions enable one to reduce thenamount of the quinonediazide radiation sensitive agents to benused and obtain a radiation sensitive composition which has bothnhigh sensitivity and highly normalized film remainingncharacteristics. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6806019-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1400850-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03073167-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100857042-B1 |
| priorityDate | 1999-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 293.