abstract |
Nanoscale pyrogenic oxides and / or mixed oxides with a BET surface area between 1 and 600 m 2 / g and a chloride content of less than 0.05% by weight are produced by organometallic and / or organometallic substances at temperatures above 200 ° C converts to the oxides.n n n The oxides can be used as polishing agents in the electronics industry (CMP). |