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filingDate 2001-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1136592-A2
titleOfInvention Method and apparatus for removal of unwanted electroplating deposits
abstract The disclosure relates to an apparatus and associated method for removing depositsnfrom a substrate. In one aspect, a system is provided which supplies etchant to an edgenbead removal chamber. The apparatus includes an etchant delivery system (106), annetchant tank (162), a sensor, and a mixing tank (168).
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