| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_646018b7183a929bbb6e26dcdb62a8da |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F1-0556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-026 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F1-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 |
| filingDate |
2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d51937967b1f227841b50d0b35acd8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f81e58ff8bb41f1e15af3d1232710532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee2f2e0c12a454482a7f8aca863fce8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fd7b1a1e6d8e6fab32c3a3d58145eec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_434121c5184468d92d6f9f5f644d178c |
| publicationDate |
2013-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1136587-B1 |
| titleOfInvention |
Deposited-film forming apparatus |
| priorityDate |
2000-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |