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publicationDate 2001-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1111096-A2
titleOfInvention Seed layer repair method
abstract Disclosed are methods of repairing metal seed layers prior to subsequent metallization.nSuch repair methods provide metal seed layers disposed on a substrate that are substantially freenof metal oxide and substantially free of discontinuities.
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