http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1110124-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6df2dbf570eb908989e67e249b57774a |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
filingDate | 1999-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86fa6720608d766edb5e989ba2c31c4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60847f9d51de662538e13745b7577345 |
publicationDate | 2001-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-1110124-A1 |
titleOfInvention | Method of making optical replicas by stamping in photoresist and replicas formed thereby |
abstract | Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is removed once the liquid photoresist is fully solidified. These structures in solidified photoresist may serve as optical elements or may be accurately transferred into the substrate. The stamp may be for an entire wafer. |
priorityDate | 1998-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.