http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1102071-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_399d433982220f3203f7f18db8c9aa28 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| filingDate | 1999-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdaf33c9cd1e898e22512f70f43831e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75fdd6e5fc44ed7f4f14b22bdae2e674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be52d192933b16a3397a2a72f53516f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d548a583eab00f7a4ace3c28d577fa47 |
| publicationDate | 2001-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1102071-A1 |
| titleOfInvention | Holder of electroconductive contactor, and method for producing the same |
| abstract | The holder for an electroconductive contact unit according to thenpresent invention uses a silicon wafer having a laminated structure including anfirst silicon layer, second silicon layer and silicon oxide film which is disposednbetween the two silicon layers. A small hole is formed in the first silicon layernfor coaxially and slidably guiding a head portion of an electroconductivenneedle member, and a large hole is formed in the second silicon layer fornreceiving a flange portion of the needle member and a compression coil springnso that the silicon oxide film serves as a stopper for the flange member. Thus,nby finishing the surface of the first silicon layer by lapping, the projectingnlength of the electroconductive needle member can be defined at a highnprecision. When the object to be tested consists of a silicon wafer, because thenholder is made of the same material as the object to be tested, and theynundergo a substantial identical thermal expansion, there is no positionalnshifting of each electroconductive needle member in simultaneously accessingna plurality of points. |
| priorityDate | 1998-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.