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publicationDate 2001-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1096556-A1
titleOfInvention Chemical-mechanical planarisation of copper
abstract Copper or a copper alloy is removed by chemical-mechanical planarisationn(CMP) in a slurry of an oxidizer, an oxidation inhibitor, and an additiventhat appreciably regulates copper complexing with the oxidationninhibitor.
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