| abstract |
A coating composition comprising a silicon compound represented by the following formula (1): SinX<1>n wherein X<1> is a hydrogen atom or a halogen atom, and n is an integer of 4 or more, on the proviso that n occurrences of X<1> may be the same as or different from one another, or a modified silane compound represented by the following formula (2): SinX<2>mYl wherein X<2> is a hydrogen atom or a halogen atom, Y is a boron atom or a phosphorus atom, n is an integer of 3 or more, l is an integer of 1 or more, and m is an integer of n to 2n+3, on the proviso that m occurrences of X<2> may be the same as or different from one another, and solvent thereof. This coating composition is suitably used in the production of a device for forming a silicon film or a boron- or phosphorous-doped silicon film on a substrate having a large area. |