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publicationDate 2002-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1072174-B1
titleOfInvention Z-pinch soft x-ray source using diluent gas
priorityDate 1998-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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