| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S95-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04C2003-0491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04B2001-249
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04B2001-2439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04B2001-2415 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04B1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04C3-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04B1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
1999-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce563229434f6786156723ae6d3edc69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b3f717cf886184a05487037c1db17a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a35639219f925ff8ef9eebd808702ae |
| publicationDate |
2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1070155-A4 |
| titleOfInvention |
INTEGRATED ION IMPLANT CLEANING SYSTEM |
| priorityDate |
1998-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |