| abstract |
A method of fabricating an elastomeric structure for a micropump ornvalve comprising: forming a first elastomeric layer on top of a firstnmicromachined mold (10), the first micromachined mold (10) having anfirst raised protrusion (11) which forms a first recess (21) extendingnalong a bottom surface of the first elastomeric layer (20); forming ansecond elastomeric layer (22) on top of a second micromachined mold, thensecond micromachined mold having a second raised protrusion (13) whichnforms a second recess (23) extending along a bottom surface of thensecond elastomeric layer, bonding the bottom surface of the secondnelastomeric layer onto a top surface of the first elastomeric layer suchnthat a control channel (30) forms in the second recess between the firstnand second elastomeric layers; and positioning the first elastomericnlayer on top of a planar substrate such that a flow channel forms in thenfirst recess between the first elastomeric layer and the planarnsubstrate. |