| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b94baf1aad802afc19b0e63b4499b04d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F32-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F36-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1999-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb4a5f90a08d2ad9f85fff135896f08e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98c4e7883966dd34b1ae4ab3c4d26dd0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a1f1841c52f888ca0b740efd7d4848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac7779913adebc3ca55ef88d2d046459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffe6def79300799994f023510626c4c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4c36b1cc7c2fdb7a214518f20101f4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2588f5a11f57110fb89505a02fb31104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c538424fa1e638bb8bdcf671da125e25 |
| publicationDate |
2000-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1060206-A1 |
| titleOfInvention |
Modified polycyclic polymers |
| abstract |
The present invention relates to cyclic polymers and their use in photolithographic applications. The cyclic polymers contain a pendant acid labile functional group and a functional group containing a protected hydroxyl moiety. The polymers are post modified by deprotecting the pendant hydroxyl moiety and reacting the deprotected hydroxyl containing moiety with a coreactant. The post-functionalized polymers find application in chemically amplified photoresist compositions. |
| priorityDate |
1998-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |