| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb78b459e21bb4fd52850a12cab27387 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D295-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 |
| filingDate |
2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_622013c30ef10eea1f91851bcffbb852 |
| publicationDate |
2000-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1059296-A1 |
| titleOfInvention |
Lewis adducts of aluminum organyls for preparation of alumina films by CVD |
| abstract |
Organometallic compounds useful for forming aluminum films by chemical vaporndeposition are disclosed. Also disclosed are methods of preparing the organometallicncompounds and methods of forming aluminum films. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1884518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1884517-A1 |
| priorityDate |
1999-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |