| abstract |
In ceramic sinter consisting of at least one kindnselected from a group consisting of silicon nitride, zirconia,nsilicon carbide, cermet, SIALON, aluminum nitride and alumina,nwear resistant member and electronic component member usingnthereof, skewness at a contact surface of the ceramic sinternis set at -2 or more and 0 or less, a depth of a micro-cracknis set at 5 µm or less, and in the depth of up to 500 µmnfrom the surface an area that pores occupy does not exceedn5 %. The ceramic sinter as described above can suppress wearnof the opponent member. Further, in such ceramic sinter,nbonding strength with an element or a metal plate can benheightened to enable to suppress peeling. The electronicncomponents of high reliability can be fabricated accordingly.nThe present wear resistant member is suitable for slidingnmember that is used in portions where wear is particularlynremarkable. The present ceramic sinter is suitable fornelectronic component member such as substrates, heat sinks ornthe like that tend to peel. |