| abstract |
Methods for preparing organic thin films on substrates (58), the method comprising the steps of providing a plurality of organic precursors (14, 48) in the vapor phase, and reacting the plurality of organic precursors (14, 48) at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses used to conduct such a method. The method is well-suited to the formation of organic light emitting devices and other display-related technologies. |