| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1670251ce05a9866e2c77b7ca52f2324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2000-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd5717db59e2fec0dfa1894fd3da5464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cffe8600ad3a6d0595bba05e34e7603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfa31bef017b87658b56f3859c17c3ac |
| publicationDate |
2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1029907-A1 |
| titleOfInvention |
Process for mechanical chemical polishing of a layer of aluminium or aluminium alloy conducting material |
| abstract |
Process for mechanical chemical polishing of a layer of an aluminium or aluminium alloynconducting material used in the microelectronics semi-conductors industry in which saidnaluminium or aluminium alloy layer is abraded using an abrasive composition whichncomprises an alkaline aqueous suspension of individualized colloidal silica particles notnlinked to each other by siloxane bonds, a tetraalkylammonium hydroxide and an oxidizingnagent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03075332-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7189684-B2 |
| priorityDate |
1999-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |