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filingDate 1999-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f329ec9f291c707206f040b2ec1ab98d
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publicationDate 2000-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1020768-A1
titleOfInvention Hydroxystyrene copolymers and photoresists comprising same
abstract The present invention relates to new copolymers and use of such copolymer as a resin binder component for photoresist compositions, particularly chemically-amplified positive-acting resists. Polymers of the invention include repeat units of 1) meta-hydroxystyrene groups, 2) para-hydroxystyrene groups, and 3) photoacid-labile groups.
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