| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087bed7abab91ae0f927879f9fe8b273 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-031 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-82 |
| filingDate |
1998-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0803b5fe5b34506642388833dc4ff408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df7d4b1e9ccfd551e463246eb0932043 |
| publicationDate |
2000-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1018145-A2 |
| titleOfInvention |
Microbellows actuator |
| abstract |
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections. Anchor structures (420, 430, 440, 450) are disclosed that improve the strength of the microbellows membrane (150). Thermopneumatic actuators having a resistive heater chip are also disclosed. |
| priorityDate |
1997-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |