| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fb905106eeabff9660bc073fb748ac5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5656 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
1998-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22c0089804e4a192165e97e1104c3ef3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee2002746e63dcb2b83db46b1c0353bb |
| publicationDate |
2000-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0994330-A1 |
| titleOfInvention |
Method for manufacturing an angular rate sensor |
| abstract |
A method of manufacturing an angular-rate sensor (1) by fabricatingncomponents of the angular-rate sensor on a silicon substrate (3), thencomponents of the angular rate sensor (1) including one or more massesn(20), a support beam and buried conductors (7). Detection means (21) arenprovided and the components are sealed in a cavity between a first glassnplate (18) and a second glass plate (19) by anodic bonding. This enablesnangular rate sensors to be fabricated using low cost silicon wafers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8164174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03084862-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7150195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6903452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1522521-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0238492-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1953516-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03084862-A2 |
| priorityDate |
1998-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |