http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0989457-A3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-239 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62 |
| filingDate | 1999-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f748fa19465f5a0fc594bd728557d7e0 |
| publicationDate | 2000-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0989457-A3 |
| titleOfInvention | Pellicle, method of preparing the same and exposure method |
| abstract | A pellicle that excellently transmits ultravioletnrays and, particularly, vacuum ultraviolet rays, does notnlose the film thickness thereof that stems from thenphotolysis and, hence, exhibits excellent lightnresistance. The pellicle is obtained by using, as anmaterial of pellicle film, an impurity-free organicnpolymer obtained by treating an organic polymer to removenat least a portion of at least any one of, preferably, anmajority portion of trace amount-metal components, highnmolecular components and incomplete molecular structurencomponents contained in the organic polymer. Theninvention further provides a method of preparing anpellicle. |
| priorityDate | 1998-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.