http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0985057-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8ae15ab0968585d4ae3941d580b16336 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3492 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0611 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate | 1998-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23e91c932d3c982ba3c3bf5df6d2045c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f692114ef32277a2a6d876ebfdacc84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca1f78ac310be535cde4366af04dc380 |
| publicationDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0985057-A1 |
| titleOfInvention | Method of forming diamond-like carbon coating in vacuum |
| abstract | A method of forming a diamond-like carbon coating in vacuum, comprising the steps of: pretreatment of the surface of the part; placing the part into a vacuum chamber; treating the surface of the part with accelerated ions; applying a sublayer of a material onto the treated surface of the part; electric arc vacuum sputtering a graphite cathode form a cathode spot and producing a carbon plasma; accelerating an ion component of the carbon plasma; depositing the produced carbon plasma on the surface of the part and producing the diamond-like carbon coating. A pulsed electric arc discharge is used, by which a plurality of cathode spots are excited at the end surface of the graphite cathode, said cathode spots moving along the end surface of the cathode at a speed of from 10 to 30 m/s and generating a carbon plasma having an ion energy of 40 to 100 eV and an ion concentration in the plasma of 10?12 to 1014 cm-3¿, with electrically insulating the part in the vacuum chamber. The temperature of the part is maintained in the range of 200 to 450 K by controlling the repetition frequency of discharge pulses. |
| priorityDate | 1997-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.