patent/EP-0979414-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0979414-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c91e894bb036ae10887f4aef12e85b16
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B33Y80-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-849 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-901 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-866 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-874
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06711 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-10
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34
filingDate	1999-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a5dc9024dc9f3f3c98210aae81b5f67
publicationDate	2000-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-0979414-A1
titleOfInvention	Multi-probe test head
abstract	In a test head for a scanning probe microscope for the contactless testing of integrated electronic circuits, a group of probes produced by three-dimensional additive lithography is disposed on a substrate. The probes are directed at a point situated centrally above the group of probes. The conducting probes as well as the base end of the capacitive probe are joined to printed circuit trace structures on the substrate for connection to a test circuit.
priorityDate	1998-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1046 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128200310

Total number of triples: 43.