| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95421ca98cd6c9b088dbf03ec09375ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1998-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa69f4d6e6b68562a3f5f19799a7a899
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f096d9f594fe33cf8cf97ff82f051a7 |
| publicationDate |
2005-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0972092-B1 |
| titleOfInvention |
Multipurpose processing chamber for chemical vapor deposition processes |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10177050-B2 |
| priorityDate |
1997-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |