| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate |
1999-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb9688a37fe75697cc00eb37b62efc34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f91078caaef49e71faefb0fd0356859
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ee048f60d788f1d350aed6f9da28d92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42006534eea6387f7b4cfc2a82ff7595
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b62b30f859f5fa8ed02d0d2ccb15919
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec86292f4902c0d091b0e2738a6958cc |
| publicationDate |
1999-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0967667-A2 |
| titleOfInvention |
Apparatus and method for preparing organic el device |
| abstract |
An apparatus for preparing an organic EL devicenincludes a substrate (1) and an evaporation source (2) innan evaporation chamber. The evaporation source (2) has ancontainer (2) made of an insulator with a thermalnconductivity of at least 50 W/m·k and receiving a sourcenmaterial therein and a surrounding resistance heater (3).nWhen the source material is heated and evaporated from thensource onto the substrate, a detector (5) detects the ratenof evaporation of the source material on the substrate andndelivers a detection signal to a control unit (6), whichncontrols the heater (3) in accordance with the signal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100420770-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1382713-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7815737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100422380-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6696096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1382713-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009053290-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1466030-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1466030-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1862788-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009014891-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1167566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1560467-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1176647-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7025832-B2 |
| priorityDate |
1998-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |