http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0966842-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e3e8d2bb1c079b667311ac4f19d12b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate | 1997-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1722c898e973545482f0d828c9bcb1b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0517d490c3fb4ab697f96e3e66533b53 |
| publicationDate | 1999-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0966842-A1 |
| titleOfInvention | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| abstract | The thin film AMA has a substrate, an actuator, a common line, and a reflecting member (180). The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer (130), a bottom electrode (135), a top electrode (145), and an active layer (140). The common line (150) is formed on a portion of actuator and is connected to top electrode (145). The electrical wiring and connecting terminal may not be damaged because the actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line (150) is formed thickly on a portion of the actuator, so a sufficient second signal is applied to the top electrode (145). The flatness of the reflecting member (180) may be enhanced because the reflecting member (180) is formed on a second sacrificial layer. |
| priorityDate | 1997-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.