| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cef1f43aa7ea51e6a592082d9f2a3103 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53233 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| filingDate |
1999-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_422bca0baf4991d08333ed7922a2cca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c708f1b8ffd01a4375700adf2d9bf84d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68eb4d35e8685919d27f8b51a0bc437 |
| publicationDate |
2005-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0933815-B1 |
| titleOfInvention |
A metallization structure on a fluorine-containing dielectric and a method for fabrication thereof |
| priorityDate |
1998-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |