| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1998-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdb0a88a781c044a0afebd6dcb38ffc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8db43a00fee50cbf9d5eb87cd286fb55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f28610a4b7ee1b3dda92996d2fdf2d3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_deb5b47b1879d1e4c001f2e089ce3122 |
| publicationDate |
2009-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0901153-B1 |
| titleOfInvention |
Method and apparatus for plating a substrate |
| priorityDate |
1997-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |