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filingDate 1998-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1999-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0899358-A2
titleOfInvention Silicon carbide fabrication
abstract An SiC fabrication comprising a CVD-SiC fabrication excellent in strength and thermal characteristics. The SiC fabrication is prepared with a CVD process (i.e. CVD-SiC fabrication) which has a thermal conductivity along the direction of the SiC crystal growth between 100 and 300 W/m.K, and an average grain diameter of the internal structure between 4 to 12 mu m. It is preferred that the ratio of the thermal conductivity along the direction of the SiC crystal growth to the thermal conductivity in the perpendicular direction is in a range of 1.10 to 1.40.
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